EnergyMax-USB J-50MUV-248 with Diffuser Energy Sensor

EnergyMax-USB J-50MUV-248 with Diffuser Energy Sensor

SKU 1191449
UOM Each

USB-enabled, 800 µJ to 1J pulse energy sensor, rep. rate up to 200 pps, 0.19 to 0.266 µm spectral range, 50 mm diameter active area.


Price $2,970.00


Details

Pyroelectric energy sensor with MaxUV coating and diffuser for measuring laser pulses from 800 µJ to 1J at up to 200 pps. Direct USB interface.

 Key Features:

  • 193 to 266 nm spectral range
  • 50 mm active area diameter
  • 800 µJ to 1J energy range
  • 200 pps repetition rate operation
  • Direct USB interface
  • ISO 17025 accredited

This J-50MUV-248 energy sensor incorporates the MaxUV coating and a diffuser to increase the maximum energy density and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This sensor is directly calibrated at 248 nm and includes spectral compensation from 193 nm to 266 nm.

The EnergyMax-USB J-50MUV-248 energy sensor is terminated in a USB cable that interfaces directly to a PC. A DB25 model (PN 1110572) is available.

A large heatsink (PN 1123432) is available to extend the energy and repetition rates of EnergyMax sensors by increasing the average power capability.

Specs

General

Cable Type
USB
Active Area Diameter
50 mm
Detector Coating
MaxUV
Energy Range
800 µJ to 1J
Wavelength Range
190 nm to 266 nm
Noise Equivalent Energy
<80 µJ
Wavelength Range (micrometers)
0.19 to 0.266
Maximum Average Power (watts)
15
Maximum Pulse Width (microseconds)
86
Maximum Energy Density (millijoules per square centimeter)
200 (at 193 nm, 10 ns)
Diffuser
Yes
Calibration Uncertainty (%)(k=2)
±3
Energy Linearity (%)
±3
Calibration Wavelength (nanometers)
193
Cable Length (meters)
3