J-50MUV-193 with Diffuser

J-50MUV-193 with Diffuser

SKU 1110575
UOM Each

125 µJ to 250 mJ pulse energy sensor, rep. rate up to 200 pps, 0.19 to 0.266 µm spectral range, 50 mm diameter active area.


Price $1,990.00 USD


Details

Pyroelectric energy sensor with MaxUV coating and diffuser for measuring laser pulses from 125 µJ to 250 mJ at up to 200 pps.

 Key Features:

  • 193 to 266 nm spectral range
  • 50 mm active area diameter
  • 125 µJ to 250 mJ energy range
  • 200 pps repetition rate operation
  • ISO 17025 accredited

This J-50MUV-193 energy sensor incorporates the MaxUV coating and a diffuser to increase the maximum energy density and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This sensor is directly calibrated at 248 nm and includes spectral compensation from 193 nm to 266 nm. It is terminated in a SmartProbe DB25 cable and is directly compatible with FieldMaxII-TOP, FieldMaxII-P, LabMax-TOP, and LabMax-Pro SSIM meters.

A large heatsink (PN 1123432) is available to extend the energy and repetition rates of EnergyMax sensors by increasing the average power capability.

Resources

Datasheets
Drawings

Specs

General

Cable Type
J DB-25
Active Area Diameter
50 mm
Detector Coating
MaxUV
Energy Range
125 µJ to 250 mJ
Wavelength Range
190 nm to 266 nm
Noise Equivalent Energy
<4 µJ
Maximum Pyroelectric Rep. Rate (pulses per second)
200
Maximum Pulse Width (microseconds)
86
Maximum Energy Density (millijoules per square centimeter)
400 (at 193 nm, 10 ns)
Maximum Energy Density (millijoules per square centimeter)
200 (@193nm, 10ns)
Diffuser
DUV
Calibration Uncertainty (%)(k=2)
±3
Energy Linearity (%)
±3
Calibration Wavelength (nanometers)
193
Cable Length (meters)
2.5

Accessories

Large Heat Sink

1123432

$175.00 USD


Those Who Bought this Also Looked At

Alternate Products

J-50MUV-193 w/o Diffuser

1146237

$1,875.00 USD