125 µJ to 250 mJ pulse energy sensor, rep. rate up to 200 pps, 0.19 to 0.266 µm spectral range, 50 mm diameter active area.
Pyroelectric energy sensor with MaxUV coating and diffuser for measuring laser pulses from 125 µJ to 250 mJ at up to 200 pps.
This J-50MUV-193 energy sensor incorporates the MaxUV coating and a diffuser to increase the maximum energy density and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This sensor is directly calibrated at 248 nm and includes spectral compensation from 193 nm to 266 nm. It is terminated in a SmartProbe DB25 cable and is directly compatible with FieldMaxII-TOP, FieldMaxII-P, LabMax-TOP, and LabMax-Pro SSIM meters.
A large heatsink (PN 1123432) is available to extend the energy and repetition rates of EnergyMax sensors by increasing the average power capability.