USB-enabled, 800 µJ to 1J pulse energy sensor, rep. rate up to 200 pps, 0.19 to 0.266 µm spectral range, 50 mm diameter active area.
Pyroelectric energy sensor with MaxUV coating and diffuser for measuring laser pulses from 800 µJ to 1J at up to 200 pps. Direct USB interface.
This J-50MUV-248 energy sensor incorporates the MaxUV coating and a diffuser to increase the maximum energy density and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This sensor is directly calibrated at 248 nm and includes spectral compensation from 193 nm to 266 nm.
The EnergyMax-USB J-50MUV-248 energy sensor is terminated in a USB cable that interfaces directly to a PC. A DB25 model (PN 1110572) is available.
A large heatsink (PN 1123432) is available to extend the energy and repetition rates of EnergyMax sensors by increasing the average power capability.