EnergyMax-USB J-25MUV-193 w/o Diffuser Energy Sensor

EnergyMax-USB J-25MUV-193 w/o Diffuser Energy Sensor

SKU 1191448
UOM Each

USB-enabled, 90 µJ to 100 mJ pulse energy sensor, rep. rate up to 500 pps, 0.19 to 2.1 µm spectral range, 25mm diameter active area.


Price $2,745.00


Details

Pyroelectric energy sensor with MaxUV coating for measuring laser pulses from 90 µJ to 100 mJ at up to 500 pps. Direct USB interface.

 Key Features:

  • 19 to 2.1 µm nm spectral range
  • 25 mm active area diameter
  • 90 µJ to 100 mJ energy range
  • 500 pps repetition rate operation
  • Direct USB interface
  • ISO 17025 accredited

This J-25MUV-248 energy sensor incorporates the MaxUV coating and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This sensor is directly calibrated at 193 nm and includes spectral compensation from 0.19 to 2.1 µm.

The EnergyMax-USB J-25MUV-193 energy sensor is terminated in a USB cable that interfaces directly to a PC. A DB25 model (PN 1110741) is available.

A large heatsink (PN 1123432) is available to extend the energy and repetition rates of EnergyMax sensors by increasing the average power capability.

Specs

General

Cable Type
USB
Active Area Diameter
25 mm
Detector Coating
MaxUV
Energy Range
90 µJ to 100 mJ
Wavelength Range
190 nm to 2100 nm
Noise Equivalent Energy
<9 µJ
Maximum Pyroelectric Rep. Rate (pulses per second)
500
Wavelength Range (micrometers)
0.19 to 2.1
Maximum Average Power (watts)
5
Maximum Pulse Width (microseconds)
43
Maximum Energy Density (millijoules per square centimeter)
200 (at 193 nm, 10 ns)
Diffuser
No
Calibration Uncertainty (%)(k=2)
±3
Energy Linearity (%)
±3
Calibration Wavelength (nanometers)
193
Cable Length (meters)
3